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MAC value 354
Mach number 121
MacMahon 4
Macor 640
Magdeburg hemispheres 3
magnesium 626
magnesium oxide 640
magnetic deflection mass spectrometer 453,465
-, application in helium leak detector 538
-, electric scanning 470,471
-, energy dispersion 468
-, magnetic scanning 471
-, mass dispersion 467
-, resolution 467,469
-, spherical dispersion 468
magnetic feedthroughs 597
magnetron gauge 369,448
main flow leak detector 540,560
manipulator systems 598
mass flow controller 611
mass number, see ‘atomic mass unit’
mass spectra of diffusion pump oils
-, Apiezon B 501
-, Santovac 502
-, silicone oil DC-704 502
material selection 614
-, ceramics 639
-, general considerations 614
-, glass 638
-, metals and alloys 634
-, outgassing 616,618,619
-, outgassing curves 616,621
-, permeability 622
-, synthetics 641
-, vacuum properties 615
-, vapour pressure 625
-, vapour pressure curves 627,628
Mathieu’s differential equations 474
maximum compression ratio 165
Maxwell-Boltzmann statistics 10
Maxwell velocity distribution 10,14
McLeod manometer 3,369,373
-, linear measuring method 375
-, quadratic measuring method 374
MDP, see ‘molecular drag pump’
MDP/side channel pump 280
-, pump properties 285
-, with side channel blower in axial setup 284
-, with side channel blower in radial setup 281
mean velocity, see ‘average velocity’
mean free path 25,26,669
measurement of pumping speed
-, according to the constant pressure method 511
-, according to the constant volume method 508
mechanical (aneroid) gauges 369,384
-, Bourdon gauge 369,385
-, capacitance gauge 369,392
-, capsule dial gauge 369,387
-, diaphragm vacuum gauge 369,388
-, piezoresistive pressure gauge 369,389
mechanical polishing 618
melting 8
melting point 671
memory effects 265,329,444,650
mercury 636,685
mercury diffusion pump 3
metal seals 581
methane 324,428,668,669,670,671
microplasma arc welding 587
migration diffusion, see ‘persorption’
millibar (mbar) 17,367,666
mineral lubricants 647
mineral oil 177,265,355
mobile adsorption 81
modulated Bayard-Alpert gauge 369,435
mole, definition 22
molecular drag pump (MDP) 234,271,272
-, comparison with Roots pump 280
-, critical backing pressure 278
-, disc version (Gaede) 303,306
-, drum version (Holweck) 272,303
-, maximum compression ratio 276
-, pump properties 280
-, pumping speed 275,279
-, pumping speed curves 273,279
molecular diameter 669
molecular flow 4,102,134
-, in a (cylindrical) tube 136
-, through an orifice 135
molecular pumps 3,160,270
-, hybrid molecular pump (HMP) 271,303
-, MDP/side channel pump 271,280
-, molecular drag pump (MDP) 271,272
-, turbomolecular pump 4,160,271,285
molecular sieve, see ‘zeolite’
molecule 5
molybdenum 637,685
molybdenum (di)sulphide 648,685
momentum equation 115
momentum transfer pump 160
monolayer adsorption 76,311
monomers 642
monomolecular adsorption, see ‘monolayer adsorption’
MOSFET 553
motion feedthroughs 594
multigas sniffing systems 558
multilayer adsorption 76
multimolecular adsorption, ‘multilayer adsorption’
multiplier, see ‘electron multiplier’
multivane pump, dry 235,239
-, exhaust valve 239
-, isochoric compression 168
-, maximum compression ratio 240
-, pump properties 240
multivane pump, oil-sealed 189
-, compression work 190
-, isochoric compression 168
-, oil consumption 189
-, pump properties 190
Mumetal 685
mutual diffusion 58
-, coefficient of 58,60
Mylar foil 615
