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Book Vacuum Science and Technology

Information about a book on Vacuum Science and Technology

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Index Y

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Book Sections

Preface
Contents
Basic concepts
Gas-solid interaction
Flow of gases through tubes and orifices
Vacuum pumps and pumping systems
Pressure measurement
Partial pressure gauges and residual gas analysis
Measurements of pump properties
Leak detection
Sealing techniques and system components
Material selection lubrication cleaning working discipline
Appendices
Index

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